| Customization: | Available |
|---|---|
| After-sales Service: | Technical Support |
| Warranty: | One Year |
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SIMVACO Vertical Continuous Magnetron Sputtering Coating Line is engineered for high-volume, high-uniformity production of advanced transparent conductive coatings, anti-reflective coatings, and multi-layer optical films. The equipment is designed for precision coating on rigid and flexible substrates, such as glass, PET, or PC, and is widely used in the display, photovoltaic, and architectural glass industries.
This system combines continuous in-line processing, vertical substrate handling, and multi-target magnetron sputtering technology to deliver superior coating performance with minimal defects and maximum throughput.
Vertical Loading & Transport:
Minimizes particle contamination and supports gravity-assisted handling. Glass panels are conveyed vertically through vacuum chambers via precision roller or belt drives.
Modular Chamber Design:
Chambers can be configured based on customer requirements:
Pre-heating chamber
Plasma surface activation/cleaning chamber
Sputtering deposition chambers (DC / MF / RF)
Cooling chamber
Unloading section
Multi-Cathode Sputtering Stations:
Equipped with planar or rotatable cathodes supporting materials such as:
Indium Tin Oxide (ITO)
Silicon Dioxide (SiO2)
Niobium Oxide (Nb2O5)
Titanium Dioxide (TiO2)
Silver (Ag)
Zinc Oxide (ZnO)
Multi-stage pumping system including rotary vane pumps, roots blowers, and turbo-molecular pumps
Base vacuum: ≤ 5 × 10-4Pa
Process vacuum: 1~5 × 10-1Pa, precisely controlled for optimal plasma conditions
Automated PLC + HMI Control System
Centralized touchscreen interface with recipe storage and full process logging
In-situ Monitoring Capabilities:
Optical monitoring (OMR, ellipsometry)
Sheet resistance measurement (non-contact)
Quartz crystal thickness monitors (QCM)
Feedback Closed-Loop Control
Ensures consistent film thickness, stoichiometry, and conductivity
Film Uniformity: ±2% over large-area substrate (max width: 1500 mm)
Deposition Rate: Up to 60 nm/min (depending on target material and power)
Adhesion Strength: ≥ 5B (ASTM D3359)
Surface Roughness (Ra): ≤ 1 nm (with post-treatment)
Reactive Gas Flow Controllers for oxide/nitride formation (Ar, O2, N2)
RF or Dual-MF Sputtering Power Supplies for high-quality dielectric films
Roll-to-Roll Configuration for flexible PET substrates (optional module)
24/7 Industrial-Grade Reliability - Built for high uptime and minimal maintenance
Custom Engineering - Adaptable to unique customer recipes and throughput needs
Integrated Cleanroom Design - Low particle generation for Class 1000+ environments
Compact Footprint - Vertical design saves factory space compared to horizontal systems
ITO Coating for touchscreens, EMI shielding, OLED displays
AR (Anti-Reflective) Coating for camera lenses, solar modules, and display glass
Multi-layer Optical Films for smart windows, infrared cut filters, low-E glass
TCO Films for thin-film solar cells
Decorative Optical Coating for architectural and automotive glass
SIMVACO has over 15 years of deep expertise in the field of vacuum coating and magnetron sputtering. With a strong in-house R&D team, international application experience, and global customer references, we deliver not just machines, but fully customized turnkey coating solutions.
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