Customization: | Available |
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After-sales Service: | Technical Support |
Warranty: | One Year |
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Advanced Transparent Conductive Film Deposition System for Industrial and Research Applications
Product Overview
SIMVACO is a leading Chinese manufacturer of vacuum coating machines with over a decade of experience in precision thin-film deposition technologies. Our ITO Conductive Film PVD Coating Equipment is specifically engineered for high-performance Indium Tin Oxide (ITO) thin-film deposition, designed to meet the growing demand for transparent conductive coatings used in next-generation display panels, touchscreens, photovoltaic cells, and smart electronic devices.
This PVD sputtering system for ITO utilizes magnetron sputtering technology to deposit uniform, low-resistivity, and high-transmittance ITO coatings on various substrates, including glass, PET, PC, PMMA, and other polymer or rigid surfaces. The equipment is ideal for both industrial-scale production and research and development environments.
Core Features
High-Precision Magnetron Sputtering
Employs DC, RF, or MF (mid-frequency) magnetron sputtering sources to achieve stable and uniform ITO film deposition with excellent adhesion.
Optimized for Transparent Conductive Films
Capable of producing films with optical transmittance >85% and sheet resistance below 15 Ω/sq, ideal for display and touch sensor applications.
Scalable Architecture
Available in batch-type chambers or inline PVD coating configurations to suit pilot projects, medium-volume production, or fully automated mass manufacturing.
Substrate Flexibility
Supports coating on both flexible and rigid materials, including ultra-thin glass, PET, PC, and other transparent or temperature-sensitive substrates.
Precision Film Thickness Control
Equipped with in-situ thickness monitoring systems (e.g., quartz crystal microbalance, optical sensors) to ensure nanometer-level accuracy.
Energy-Efficient and Cleanroom-Ready
Low power consumption and optional cleanroom interface make this system environmentally friendly and suitable for high-purity applications.
Typical Applications
SIMVACO's ITO PVD coating machines are widely used in multiple high-tech industries, including:
Touch Panels & LCD/OLED Displays
Flexible and Rigid Solar Cells
Smart Windows & Electrochromic Glass
Optoelectronic Devices & LED Lighting
Flexible Electronics & Wearables
Antistatic and EMI Shielding Films
Technical Parameters (Customizable)
Specification | Value |
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Deposition Method | Magnetron Sputtering (DC / RF / MF) |
Coating Material | Indium Tin Oxide (ITO) |
Substrate Sizes | 300 mm × 300 mm up to 1200 mm × 1500 mm |
Film Thickness Range | 10 - 500 nm |
Film Uniformity | ≤ ±3% |
Sheet Resistance | <15 Ω/sq |
Optical Transmittance | >85% in visible spectrum |
Base Pressure | ≤ 5×10-4 Pa |
Power Configuration | 10 kW to 60 kW (customizable) |
Chamber Type | Vertical / Horizontal, Batch / Inline |
Control System | PLC + HMI with remote diagnostics |
Why Choose SIMVACO?
Over 15 Years of Coating System Manufacturing Experience
Exported to Over 40 Countries Including Europe, Southeast Asia, and the Americas
Full Turnkey Solutions: Including chamber design, installation, operator training, and after-sales service
Support for Custom R&D and Pilot Scale Coating Projects
Stable Operation with Low Maintenance Costs
Contact SIMVACO Today
Ready to enhance your conductive film manufacturing capabilities? Reach out to SIMVACO today for a customized solution.
SIMVACO - Professional PVD Coating Solutions. Innovation through Precision.