Customization: | Available |
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After-sales Service: | Technical Support |
Warranty: | 1 Year |
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SIMVACO's ITO Glass Magnetron Sputtering Coating Line is a state-of-the-art vacuum deposition system designed for precision coating of functional glass substrates, including Indium Tin Oxide (ITO) coated glass, Low-E energy-saving glass, touch screen panel glass, and photovoltaic solar glass. This horizontal in-line sputtering system ensures uniform, large-area coatings with high throughput, making it ideal for both architectural and electronic applications.
Indium Tin Oxide (ITO) is a transparent conductive oxide widely used in touchscreens, LCD displays, and optoelectronic devices.
SIMVACO's coating line enables precise deposition of ultra-thin ITO films with controlled resistivity and excellent transmittance.
The system supports both mono-layer and multi-layer TCO structures for high-performance electronic glass.
Low-Emissivity (Low-E) glass improves energy efficiency by reflecting infrared radiation while allowing visible light transmission.
SIMVACO's magnetron sputtering system enables deposition of silver-based Low-E films, with anti-oxidation interlayers for durability.
Widely used in curtain walls, smart windows, and green buildings.
The system supports anti-reflection, TCO, and back-side reflective layer deposition for PV glass.
Applicable to BIPV, thin-film solar modules, and next-gen solar cells.
Feature | Description |
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Structure | Horizontal inline architecture with multiple sputtering chambers |
Deposition Technology | Magnetron sputtering (DC / MF / RF customizable) |
Glass Size Supported | Up to 2,400mm width (customizable) |
Layer Uniformity | ±3% thickness uniformity over full surface |
Process Gas | Ar, O2, N2; optional reactive sputtering configurations |
Control System | PLC+HMI interface with recipe storage, real-time monitoring |
Optional Add-ons | Pre-cleaning, heating zone, IR annealing, ion source |
Precise Film Control - Achieve targeted resistivity (10-3 ~ 10-4 Ω·cm) and visible light transmission (>85%)
Modular Line Design - Flexible chamber configurations to match different coating stacks
Robust Industrial Design - 24/7 operation with proven reliability in high-output environments
Global Service - Installed across Southeast Asia, Middle East, and Eastern Europe with on-site support
Turnkey Solutions - From equipment design to process tuning and operator training
ITO (Indium Tin Oxide)
SiO2, TiO2, SnO2 (dielectrics for antireflection)
Ag, NiCr, Al (for Low-E or multi-layer structures)
AZO, ZnO:Al (cost-effective alternatives for PV glass)
Industry | Application Examples |
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Electronics | Capacitive touch panels, LCD displays, OLED screens |
Architecture | Low-E building glass, double-glazed energy-saving units |
Photovoltaics | BIPV glass, thin-film solar modules, perovskite panels |
Smart Devices | Wearables, car touchscreens, transparent electronics |
SIMVACO is a professional manufacturer of vacuum coating equipment with over a decade of experience in developing customized PVD coating systems. Our factory delivers high-performance, scalable, and energy-efficient solutions for industrial clients worldwide.